The Solaris 75 is a low cost, small footprint
Rapid Thermal Processing system designed
for research applications and processing
samples up to 75mm in diameter. The
advanced temperature measurement
technique and state of the art signal
conditioners allow the PID graphical software
controller to maintain stable and repeatable
temperatures through a wide process
application base. The system is provided with
a the latest pentuim PC with Windows
compatible software for editing recipes and
process data logging.
The Solaris 75 utilizes 13 quartz halogen
lamps on top and bottom of the wafer to
reduce non-uniform heating from pattern
effects seen on single sided RTA systems.
The high-purity quartz wafer holder and
chamber is manufactured out of
semiconductor grade low OH quartz to
eliminate metallic contamination.
The oven contains gold reflectors for fast
heating rates and long lamp lifetimes.
A SiC coated graphite susceptor is available
for processing compound semiconductor
samples up to 75 mm.
Rapid Thermal Processing system designed
for research applications and processing
samples up to 75mm in diameter. The
advanced temperature measurement
technique and state of the art signal
conditioners allow the PID graphical software
controller to maintain stable and repeatable
temperatures through a wide process
application base. The system is provided with
a the latest pentuim PC with Windows
compatible software for editing recipes and
process data logging.
The Solaris 75 utilizes 13 quartz halogen
lamps on top and bottom of the wafer to
reduce non-uniform heating from pattern
effects seen on single sided RTA systems.
The high-purity quartz wafer holder and
chamber is manufactured out of
semiconductor grade low OH quartz to
eliminate metallic contamination.
The oven contains gold reflectors for fast
heating rates and long lamp lifetimes.
A SiC coated graphite susceptor is available
for processing compound semiconductor
samples up to 75 mm.
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MPT 600s wafer ID wafer marking
MPT 600s wafer ID wafer marking
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Solaris 75 Rapid Thermal Processing System