SSI has partnered with
Materials Science Solutions
Solutions to provide spare
parts and upgrades to older
generation Etch Equipment.
Materials Science Solutions
Solutions to provide spare
parts and upgrades to older
generation Etch Equipment.
Lam Research 4500i Replacement Parts
Materials Science Solutions introduces a plug and play
solution for the Lam Research 4500i isotropic etch
chamber wafer pedestal.
The MSS solution eliminates premature failures due to
heating element current overload by providing
redundancy in the heating element circuitry.
The Materials Science Solutions 4500i isotropic etch
chamber wafer pedestal eliminates organic
contamination from glues and sealants common to the
Lam Research design. A surface coated backplate is
utilized to seal the heating element from the plasma
stream.
In addition the MSS is available in a Yttrium Oxide or
Alumina surface coating that reduces the susceptibility
of Aluminum Fluoride contamination on wafer backsides.
Advantages of the MSS 4500i isotropic wafer pedestal
-Increased reliability through redundancy in
heating element
-Elimination of AlF contamination with Y2O3 or
Al2O3 surface coating
-Elimination of organic contaminants by
removal of glues and sealants
-Increased wafer temperature uniformity
-Easy replacement of heating element
-Re-usable paddle
-Trade-in and replacement programs available
-9600 Stripper Paddle Coming Soon
solution for the Lam Research 4500i isotropic etch
chamber wafer pedestal.
The MSS solution eliminates premature failures due to
heating element current overload by providing
redundancy in the heating element circuitry.
The Materials Science Solutions 4500i isotropic etch
chamber wafer pedestal eliminates organic
contamination from glues and sealants common to the
Lam Research design. A surface coated backplate is
utilized to seal the heating element from the plasma
stream.
In addition the MSS is available in a Yttrium Oxide or
Alumina surface coating that reduces the susceptibility
of Aluminum Fluoride contamination on wafer backsides.
Advantages of the MSS 4500i isotropic wafer pedestal
-Increased reliability through redundancy in
heating element
-Elimination of AlF contamination with Y2O3 or
Al2O3 surface coating
-Elimination of organic contaminants by
removal of glues and sealants
-Increased wafer temperature uniformity
-Easy replacement of heating element
-Re-usable paddle
-Trade-in and replacement programs available
-9600 Stripper Paddle Coming Soon
EDX analysis of Aluminum Fluoride
contamination on wafer backside
contamination on wafer backside
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Materials Science Solutions Isotropic
Chamber Pedestal With Alumina coating
Chamber Pedestal With Alumina coating
Premature Failure on Lam Research
Pedestal due to delamination of the heating
element
Pedestal due to delamination of the heating
element
SEM of Aluminum Fluoride contamination on
wafer backside
wafer backside